**Books**

- Eric R Marsh, 2010,
*Precision spindle metrology*, DEStech publications

- Eric R Marsh, 2008,
*Precision spindle metrology*, DEStech Publications

**Book, Chapters**

- John A. Patten, Jerry Jacob, Biswarup Bhattacharya and Eric R Marsh, 2007,
*Numerical simulations and cutting experiments on single point diamond machining of semiconductors and ceramics*, pp. Ch. 2, 36

**Journal Articles**

- Byron R. Knapp, Eric R Marsh, Francis Cipriani, David A. Arneson, Daniel D. Oss, Melvin J. Liebers and Eric E. Keller, 2013, "Nanometer-level axis of rotation metrology for a high-precision macromolecular X-ray diffractometer", Journal of Physics: Conference Series,
**425**, (1)

- Eric R Marsh, Edward J. Sommer, Theodore R. S. Deakyne, George A. Kim and James A. Simonson, 2010, "Detection of orientation-dependent, single-crystal diamond tool edge wear using cutting force sensors, while spin-turning silicon", Precision Engineering,
**34**, (2), pp. 253-258

- Eric R Marsh, David A. Arneson and Donald L. Martin, 2010, "A comparison of reversal and multiprobe error separation", Precision Engineering,
**34**, (1), pp. 85-91

- Alex W. Moerlein, Eric R Marsh, Theodore R. S. Deakyne and R. Ryan Vallance, 2009, "In-process force measurement for diameter control in precision cylindrical grinding", International Journal of Advanced Manufacturing Technology,
**42**, (1-2), pp. 93-101

- Eric R Marsh, Alex Moerlein, Theodore Deakyne and Matthew Van Doren, 2008, "In-process measurement of form error and force in cylindrical plunge grinding", Precision Engineering,
**32**, (4), pp. 348-352

- R. Ryan Vallance, Behnoush Haghghian and Eric R Marsh, 2008, "A unified geometric model for designing elastic pivots", Precision Engineering,
**32**, pp. 278-288

- Eric R Marsh, David A. Arneson, Melvin J. Liebers and Michael W. Olson, 2008, "Effects of gas composition on asynchronous error motion in externally pressurized spindles", Precision Engineering,
**32**, (2), pp. 143-147

- Eric R Marsh, Jeremiah A. Couey, R. Ryan Vallance and Allen A. Yi, 2007, "The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon", International Journal of Manufacturing Technology and Management,
**12**, (1/2/3), pp. 270-283

- Tony A. Schmitz, Jeremiah A. Couey, Eric R Marsh, Nathan Mauntler and D. Hughes, 2007, "Runout effects in milling: Surface finish, surface location error, stability", International Journal of Machine Tools and Manufacture,
**47**, pp. 847-851

- Eric R Marsh, Jeremiah A. Couey and R. Ryan Vallance, 2006, "Nanometer-level comparison of three spindle error motion separation techniques", ASME Journal of Manufacturing Science,
**128**, (1), pp. 180-187

- Eric R Marsh, Jeremiah A. Couey and R. Ryan Vallance, 2006, "Roundness measurement of spherical artifacts at arbitrary latitude", Precision Engineering,
**30**, (3), pp. 353-356

- Eric R Marsh, David C. Schalcosky, Jeremiah A. Couey and R. Ryan Vallance, 2006, "Analysis and performance of a parallel-axis flatness measuring instrument", Review of Scientific Instruments,
**77**, (2)

- Eric R Marsh, D. A. Arneson, M. J. Van Doren and S. A. Blystone, 2006, "Interferometric measurement of workpiece flatness in ultra-precision flycutting", Sensor Review,
**26**, (3), pp. 209-217

- C. J. Morgan, R. R. Vallance and Eric R Marsh, 2006, "Micro-machining and micro-grinding with tools fabricated by micro electro-discharge machining", International Journal of Nanomanufacturing,
**1**, (2), pp. 242-258

- B. P. O'Connor, Eric R Marsh and J. A. Couey, 2005, "On the effect of crystallographic orientation on ductile material removal in silicon", Precision Engineering,
**29**, (1), pp. 124-132

- R. D. Grejda, Eric R Marsh and R. R. Vallance, 2005, "Techniques for calibrating spindles with nanometer error motion", Precision Engineering,
**29**, (1), pp. 111-123

- Eric R Marsh, B. P. John, J. A. Couey, J. Wang and R. D. Grejda, 2005, "Predicting surface figure in diamond turned calcium fluoride using in-process force measurement", Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures,
**23**, (1), pp. 84-89

- R. R. Vallance, Eric R Marsh and P. T. Smith, 2005, "Effects of spherical targets on capacitive displacement measurements", ASME Journal of Manufacturing Science,
**126**, (4), pp. 822-829

- B. R. Knapp and Eric R Marsh, 2005, "On the design and implementation of an instrumented grinding testbed", Sensor Review,
**25**, (2), pp. 155-161

- P. T. Smith, R. R. Vallance and Eric R Marsh, 2005, "Correcting capacitive displacement measurements in metrology applications with cylindrical artifacts", ASPE Journal of Precision Engineering,
**29**, (3), pp. 324-335

- J. A. Couey, Eric R Marsh, B. K. Knapp and R. R. Vallance, 2005, "Monitoring force in precision cylindrical grinding", ASPE Journal of Precision Engineering,
**29**, (3), pp. 307-314

- S. Chikkamaranhalli, R. R. Vallance, A. Khan, Eric R Marsh, O. A. Rawashdeh, J. E. Lump and B. L. Walcott, 2005, "A precision instrument for characterizing shape memory alloy wires in bias spring actuation", Review of Scientific Instruments,
**76**, (6)

- J. A. Couey, Eric R Marsh, B. R. Knapp and R. R. Vallance, 2005, "In-process force monitoring for precision grinding semiconductor silicon wafers", International Journal of Manufacturing Technology and Management,
**7**, (5-6), pp. 430-440

- R. R. Vallance, K. F. Hill, R. D. Grejda and Eric R Marsh, 2004, "Error motion of a kinematic spindle", Precision Engineering,
**28**, (2), pp. 204-217

- R. R. Vallance, C. J. Morgan, S. M. Shreve and Eric R Marsh, 2004, "Micro tool characterization using scanning white light interferometry", Journal of Micromechanics and Microengineering,
**8**, pp. 1234-1243

- C. J. Morgan, R. R. Vallance and Eric R Marsh, 2004, "Micro machining glass with polycrystalline diamond tools shaped by micro Electro Discharge Machining", Journal of Micromechanics and Microengineering,
**14**, pp. 1687-1692

- Eric R Marsh and R. D. Grejda, 2000, "Experiences with the master axis method for measuring spindle error motions", Precision Engineering,
**24**, (1), pp. 50-57

- Eric R Marsh, R. D. Grejda and B. R. Knapp, 2000, "Superabrasive grinding process optimization through force measurement", Abrasives, pp. 29-33

- Eric R Marsh and R. D. Grejda, 2000, "Air bearing spindle instrumentation for precision grinding of ceramics", Finer Points, pp. 6

- Eric R Marsh and A. J. Schaut, 1998, "Measurement and simulation of regenerative chatter in diamond turning", Precision Engineering,
**22**, (4), pp. 252-257

- Eric R Marsh, D. S. Yantek, M. A. Davies and D. E. Gilsinn, 1998, "Simulation and measurement of chatter in diamond turning", Journal of Manufacturing Science and Engineering,
**120**, (2), pp. 230-235

- Eric R Marsh, B. J. Maher and C. L. White, 1998, "Modeling of silicon wafer vibration in semiconductor process tools", Journal of Sound and Vibration,
**210**, (2), pp. 231-241

- Eric R Marsh and L. C. Hale, 1998, "Damping of flexural waves with imbedded viscoelastic materials", Journal of Vibration and Acoustics,
**120**, (1), pp. 188-193

- Eric R Marsh, R. D. Grejda, D. A. Arneson, M. A. Liebers and D. Q. Martin, 1998, "Instrumented testbed for precision grinding", Abrasives, pp. 36-46

- Eric R Marsh and D. S. Yantek, 1997, "Experimental measurement of precision bearing dynamic stiffness", Journal of Sound and Vibration,
**202**, (1), pp. 55-66

- Eric R Marsh, B. J. Maher and C. L. White, 1997, "Identification and abatement of silicon wafer vibration in semiconductor process tools",
**3**, (1), pp. 255-260

- Eric R Marsh and A. H. Slocum, 1996, "An integrated approach to structural damping", Precision Engineering,
**18**, (2-3), pp. 103-109

- A. H. Slocum and Eric R Marsh, 1994, "A new damper for machine tool structure: The replicated internal viscous damper", Precision Engineering,
**16**, (3), pp. 174-183

**Conference Proceedings**

- Byron Knepp, David Arneson and Eric R Marsh, 2013, "Dynamic probe calibration for form measurement using a simplified sensitivity standard", Proceedings of the 11th ISMTII

- Eric E. Keller, Eric R Marsh and Byron R. Knapp, 2013, "Synchronous signal removal via wavelet packets", Annual Meeting of the American Society for Precision Engineering

- Byron Knapp, Daniel Oss, David Arneson, Mel Liebers and Eric R Marsh, 2013, "Large aperture ultra-precision air bearing spindle", Annual Meeting of the American Society for Precision Engineering

- Byron Knapp, Daniel Oss, David Arneson, Mel Liebers and Eric R Marsh, 2013, "Dynamic characterization of an air bearing spindle as a tool to predict asynchronous error", Proceedings of the 13th euspen International Conference

- Byron R. Knapp, Eric R Marsh, David A. Arneson and Donald L. Martin, 2010, "Nanometer-level spindle metrology in a production environment", Proceedings of the 9th euspen International Conference

- Eric R Marsh, 2008, "A comparison of reversal and multiprobe error separation methods", Proc. of the European Society of Precision Engineering (euspen)

- Chris J. Morgan, R. Ryan Vallance and Eric R Marsh, 2007, "Specific grinding energy while microgrinding tungsten carbide with polycrystalline diamond micro tools", ICOMM,
**39**

- Chris J. Morgan, R. Ryan Vallance and Eric R Marsh, 2006, "Improved finish and form of blind holes using polycrystalline diamond micro tools", ICOMM,
**64**

- Neil Loychik, Mathieu Barraja, Afzal Khan, Ryan R. Vallance, Eric R Marsh and David A. Arneson, 2006, "Mechanical design of a precision instrument for measuring the roundness profiles of micro shafts", Manufacturing Science & Engineering (MSEC)

- Tony L. Schmitz, Jeremiah A. Couey, Eric R Marsh and Michael F. Tummond, 2004, "The role of cutter eccentricity on surface finish and milling forces", Proceedings of ASME International Mechanical Engineering Congress and Exposition, Manufacturing Engineering Division, MED,
**15**, pp. 1011-1018

- A. H. Slocum, M. S. Basaran, R. A. Cortesi and Eric R Marsh, 2003, "Modular OD/ID grinding machine with bearings preloaded by inclined iron core linear electric motor", Proc. of the European Society of Precision Engineering (euspen)

- Eric R Marsh and B. P. O'Connor, 2003, "On the ductile/brittle transition in monocrystalline silicon", UNCC/NSF Conference on Phase Transformation on Brittle Materials

- Eric R Marsh and R. D. Grejda, 1999, "Air bearing spindle instrumentation for precision grinding of ceramics", Ceramic Engineering and Science Transactions,
**102**, pp. 17-26

- Eric R Marsh, R. D. Grejda and D. Q. Martin, 1999, "Experiences with the master axis method for measuring spindle error motions", Proc. of the 1st European Society for Precision Engineering and Nanotechnology Conf., pp. 171-174

- D. S. Yantek, Eric R Marsh, M. A. Davies and D. E. Gilsinn, 1997, "Simulation and measurement of chatter in diamond turning", Proceedings of the 1997 ASME Manufacturing Science and Technology Conference,
**MED-2**

- Eric R Marsh, D. Q. Martin, D. E. Arneson and M. L. Liebers, 1997, "Instrumented air bearing spindle for precision grinding", Proc. Int. Conf. on Precision Eng., Japanese Soc. of Precision Eng.,
**1**, pp. 141-146

- T. A. Baker and Eric R Marsh, 1996, "Error localization for machine tool structures", Proceedings of the 14th International Modal Analysis Conference,
**761-768**

- Eric R Marsh and L. C. Hale, 1995, "Damping machine tools with imbedded viscoelastic materials constrained by a shear tube", Proc. 1995 ASME Design Engineering Tech. Conf., Vibration Control, Analysis, and Identification, pp. 9-14

- Henry Arneson and Eric R Marsh, , "Effects of machine compliance in micro-grinding", euspen's 16th International Conference

**Other**

- David Arneson, Daniel Oss, Melvin Liebers and Eric Marsh, 2014, "Large-aperture ultra-precision air bearing spindles"

- Eric Marsh, Eric Keller, Kyun Hee Koh, Matthew Gean, R. Ryan Vallance and Byron Knapp, 2014, "Process optimization in microgrinding of freeform surfaces"

- Eric Marsh, Byron Knapp and David Arneson, 2014, "Uncertainty sources in multi-probe error separation"

- Byron R. Knapp, Eric R Marsh, Francis Cipriani, David A. Arneson, Daniel D. Oss, Melvin J. Liebers and Eric E. Keller, 2012, "Nanometer-level axis of rotation metrology for a high-precision macromolecular X-ray diffractometer"

- Eric R Marsh, Donald L. Martin and David A. Arneson, 2012, "Advances in spindle metrology for grinding monitoring"

- Byron R. Knapp, Daniel D. Oss, David A. Arneson, Melvin J. Liebers and Eric R Marsh, 2012, "Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles"

- Theodore R.S. Deakyne, Eric R Marsh, Eric E. Keller, Robert Ryan Vallance, Kyun-Hee Koh and Byron R. Knapp, 2012, "Investigation of the dynamic grinding forces resulting from the machine compliance leading to regenerative chatter", pp. p. 422

- Eric E. Keller, Eric R Marsh, Theodore R.S. Deakyne, Robert Ryan Vallance and Byron R. Knapp, 2012, "Experimental apparatus for metrology of partial cylinders", pp. p. 209

- Eric E. Keller, Eric R Marsh, Theodore R. S. Deakyne, Byron R. Knapp and David A. Arneson, 2012, "Ball bearing analyzer apparatus", pp. p. 206

- Byron R. Knapp, Daniel D. Oss, David A. Arneson, T. Graber, R. Henning and Eric R Marsh, 2012, "Water-cooled heat load chopper for high-energy synchrotron experiments", pp. 30

- Byron R. Knapp, David A. Arneson, Daniel D. Oss, Melvin J. Liebers, R. Ryan Vallance and Eric R Marsh, 2011, "Importance of spindle balancing for the machining of freeform optics"

- Byron R. Knapp, David A. Arneson, Melvin J. Liebers, Daniel. D. Oss and Eric R Marsh, 2011, "Design and testing of a step compensated bi-conic hydrostatic spindle"

- Theodore R. S. Deakyne, Eric R Marsh, Eric E. Keller, Ryan R. Vallance, Kyun Hee Koh and Byron R. Knapp, 2011, "Face grinding monitoring and optimization through force measurements"

- Matthew J. Van Doren, William H. Dornfeld and Eric R Marsh, 2011, "Flexure-based, parallel nano-positioning robot"

- Byron R. Knapp, David A. Arneson, Melvin J. Liebers, Eric R Marsh and Eric E. Keller, 2011, "Manufacture and testing of nanometer-level spindle metrology testballs"

- Timothy Hahn, Mel Liebers, David Arneson, Byron Knapp and Eric R Marsh, 2011, "Assembling and testing a tapered roller bearing spindle"

- Byron Knapp, Eric R Marsh, David Arneson and Edward Sommer, 2010, "Full five dof error characterization of ultra-precision spindles using the multiprobe method"

- Byron Knapp, David Arneson, Dan Oss, Mel Liebers, Ryan Vallance and Eric R Marsh, 2010, "Importance of spindle balancing for the machining of freeform optics"

- Theodore R. S. Deakyne, Eric R Marsh and David L. Arneson, 2009, "In-process grinding wheel surface inspection using machine vision", pp. 319-322

- Byron R. Knapp, David A. Arneson, Melvin J. Liebers, Daniel D. Oss and Eric R Marsh, 2009, "Design and testing of a step compensated bi-conic hydrostatic spindle", pp. 254-257

- Eric R Marsh, George A. Kim and James A. Simonson, 2008, "Detection of orientation-dependent, single-crystal diamond tool edge wear using cutting force sensors, while spin-turning silicon"

- Theodore R. S. Deakyne, Eric R Marsh, John Lehman and Brent Bartlett, 2008, "Machine vision with spindle metrology using a CCD camera"

- Alex W. Moerlein, Eric R Marsh, R. Ryan Vallance and Christopher J. Morgan, 2007, "Control of low-infeed grinding using force and diameter measurement"

- Christopher J. Morgan, R. Ryan Vallance and Eric R Marsh, 2007, "Design and modeling of a kinematically-constrained traction drive spindle for micro machining"

- Michael W. Olson, David A. Arneson, Melvin J. Liebers and Eric R Marsh, 2007, "Effects of gas composition on asynchronous error motion in externally-pressurized spindles"

- Mathieu Barraja, R. Ryan Vallance, George Mathai and Eric R Marsh, 2007, "An elastic bearing for rectilinear translations and its application within a micro metrology instrument"

- Eric R Marsh, 2007, "Smart spindles: Instrumentation for real time process monitoring"

- Chunhe Zhang, Allen Y. Yi, R. Ryan Vallance and Eric R Marsh, 2007, "Ultra-precision micromachining of micro-fluidic devices by use of a high-speed air-bearing spindle"

- Eric R Marsh and R. Ryan Vallance, 2006, "Analysis and performance of a parallel-axis flatness measuring instrument"

- Eric R Marsh and R. Ryan Vallance, 2006, "The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon"

- R. Ryan Vallance, Behnoush Haghighian and Eric R Marsh, 2006, "A general geometric model for determining optimal shapes of planar elastic pivots"

- Monash Barraja, R. Ryan Vallance, Neil Loychik, Eric R Marsh and David A. Arneson, 2006, "Design and evaluation of a prototype instrument for measuring roundness profiles of micro shafts"

- Eric R Marsh and R. R. Vallance, 2005, "Force sensors in monitoring precision grinding"

- Eric R Marsh, D. A. Arneson, M J. Van Doren and S. A. Blystone, 2005, "The effects of spindle dynamics on precision flycutting"

- Eric R Marsh, J. A. Couey and R. R. Vallance, 2005, "Nanometer-level comparison of three spindle error motion separation techniques"

- C. J. Morgan, R. R. Vallance and Eric R Marsh, 2005, "Micro grinding blind holes in hard tungsten carbide with polycrystalline diamond micro tools"

- P. T. Smith, C. J. Morgan, I. S. Omer, R. R. Vallance and Eric R Marsh, 2005, "Design and manufacture of a capacitance probe for hole metrology"

- A. Khan, R. R. Vallance and Eric R Marsh, 2005, "Shape memory alloys for actuating nano positioners with elastic bearings"

- J. Jacob, J. A. Patten, B. Bhattacharya, J. A. Couey and Eric R Marsh, 2005, "Determination of the ductile to brittle transition and critical depth of cut in 6H-silicon carbide through fly-cutting"

- J. A. Couey, Eric R Marsh and R. R. Vallance, 2004, "A comparison of force and acoustic emission sensors in monitoring precision cylindrical grinding", pp. 105-108

- Eric R Marsh, J. A. Couey and B. P. John, 2004, "On the tool wear and subsurface damage of single point diamond turning calcium fluoride", pp. 502-505

- R. R. Vallance, Eric R Marsh and P. T. Smith, 2004, "Effects of targeting spherical surfaces with capacitive displacement sensors", pp. 454-457

- R. R. Vallance, C. J. Morgan, S. M. Shreve and Eric R Marsh, 2004, "Characterizing form, waviness, and roughness of micro EDM electrodes", pp. 709-712

- Eric R Marsh and V. C. Vigliano, 2002, "Ultraprecision bearing metrology"

- R. D. Grejda and Eric R Marsh, 2001, "Nanometer level spindle calibration", pp. 12-18

- B. R. Knapp and Eric R Marsh, 2001, "Predicting the rotational accuracy of hydrostatic spindles", pp. 52-55

- V. C. Vigliano and Eric R Marsh, 2001, "Testing with a precision bearing analyzer", pp. 109-113

- B. P. O'Connor, R. D. Grejda, B. R. Knapp and Eric R Marsh, 2001, "Single point diamond machining of silicon", pp. 461-465

- B. R. Knapp, Eric R Marsh, R. D. Grejda and D. C. Schalcosky, 2001, "Superabrasive grinding process optimization through force measurement", pp. 58-61

- Eric R Marsh, 2000, "Instrumentation for precision grinding of difficult materials"

- L. M. Hanagan and Eric R Marsh, 2000, "Active control of floor vibration"

- R. D. Grejda and Eric R Marsh, 2000, "Effects of crystallographic orientation on tool wear and machining forces in silicon", pp. 94-97

- B. R. Knapp, B. P. O'Connor and Eric R Marsh, 2000, "Characterization of porous graphite air bearings", pp. 211-214

- V. C. Vigliano and Eric R Marsh, 2000, "The design and use of a precision bearing analyzer", pp. 409-412

- Eric R Marsh and R. D. Grejda, 2000, "Air bearing spindle instrumentation for diamond grinding of ceramics"

- R. D. Grejda and Eric R Marsh, 1999, "Glass grinding using structured superabrasives", pp. 87-90

- B. R. Knapp and Eric R Marsh, 1999, "Benefits of variable speed grinding", pp. 115-118

- Eric R Marsh and R. D. Grejda, 1999, "Experiences with the master axis method for measurement of spindle error motion", pp. 405-408

- B. R. Knapp and Eric R Marsh, 1998, "Design and testing of a capacitance probe calibrator", pp. 449-452

- R. D. Grejda and Eric R Marsh, 1998, "A master axis for measurement of spindle error motion", pp. 488-491

- B. R. Knapp and Eric R Marsh, 1997, "Experimental verification of a grinding chatter model", pp. 101-105

- A. J. Schaut and Eric R Marsh, 1997, "Effects of round-nosed tools on chatter in diamond turning", pp. 111-115

- T. B. O'Reilly and Eric R Marsh, 1997, "An orthogonal cutting stability model with variable delay length due to tool motion", pp. 151-156

- A. D. Devitt and Eric R Marsh, 1996, "An investigation into high stiffness adjustable natural frequency hydrostatic slide units", pp. 12-16

- Eric R Marsh and D. S. Yantek, 1996, "The role of loop stiffness in centerless grinding", pp. 16-21

- J. D. Flinchbaugh and Eric R Marsh, 1996, "Grinding machine technology required to achieve ductile regime ceramic grinding"

- Eric R Marsh, 1996, "Dynamic analysis of machine tools"

- P. A. Scagnetti, Eric R Marsh and N. D. Staedke, 1995, "A new method for improving dynamic stiffness of advanced ceramic structures", pp. 322-328

- P. A. Scagnetti, Eric R Marsh, N. D. Staedke and A. H. Slocum, 1995, "Shear damping of advanced ceramic structures", pp. 343-353